EUV Resist Manufacturing Facility completed


TOKYO, Japan and Leuven, Belgium – March 1, 2017 – The EUV Resist Manufacturing & Qualification Center NV (EUV RMQC), a Joint Venture between JSR Micro NV, a leading materials company, and imec, the world-leading research and innovation hub in nanoelectronics and digital technology, announced today that it has reached a milestone with the completion of a new manufacturing facility in Belgium, enabling manufacturing and quality control of EUV photoresists for the semiconductor industry.   The new facility is equipped with four sizes of vessels in cleanroom environment and a team of trained staff runs the operations.  

“We are confident this facility will serve the industry with superior, high-quality manufacturing capabilities, expertise and services for quality control with the advanced tools at imec,” said Bart Denturck, President of EUV RMQC and JSR Micro NV.  “EUV RMQC is a unique joint venture that works with its partners in the industry in a shared platform environment, aiming to advance scaling through commercially viable EUV materials by leveraging stable, high-quality production and precise materials qualification capabilities.” 

“EUV lithography is key to enable the patterning of advanced technology nodes, and this new facility will support the manufacturing of EUV resists for high volume manufacturing,” stated An Steegen, EVP at imec.

EUV lithography is considered one of the main drivers to extend Moore’s law toward single digit nanometer technology nodes. Imec and JSR’s collaboration will allow both companies to leverage their strengths when delivering photoresist solutions for the semiconductor industry to manufacture the most advanced devices.

About EUV Resist Manufacturing & Qualification Center NV (EUV RMQC)
EUV RMQC was established in December 18, 2015 between JSR’s wholly-owned subsidiary in Belgium, JSR Micro NV, and imec, enabling manufacturing and quality control of EUV lithography materials for the semiconductor industry. Its production site locates in JSR Micro NV premises in Leuven, Belgium and uses full-scale EUV Scanner and other tools at imec facility. It is incorporated with a majority of the total shares held by JSR Micro NV.

About JSR Corporation
JSR Corporation is a multinational company employing more than 6,000 people worldwide and a leading materials supplier in a variety of technology driven markets. JSR's global network is headquartered in Tokyo (Japan) and has factories and offices in Europe, USA, China, Taiwan, Korea, Singapore and Thailand. JSR is a research-oriented organization that pursues close collaborations with leading innovators in a number of industries that are a key to the present and future welfare of human society: life-sciences, energy storage, synthetic rubbers, electronic materials, display and optical materials. 
For more information about JSR Corporation, please go to

About imec
Imec is the world-leading research and innovation hub in nano-electronics and digital technologies. The combination of our widely acclaimed leadership in microchip technology and profound software and ICT expertise is what makes us unique. By leveraging our world-class infrastructure and local and global ecosystem of partners across a multitude of industries, we create groundbreaking innovation in application domains such as healthcare, smart cities and mobility, logistics and manufacturing, and energy. 

As a trusted partner for companies, start-ups and universities we bring together close to 3,500 brilliant minds from over 70 nationalities. Imec is headquartered in Leuven, Belgium and also has distributed R&D groups at a number of Flemish universities, in the Netherlands, Taiwan, USA, China, and offices in India and Japan. In 2015, imec's revenue (P&L) totaled 415 million euro and of iMinds which is integrated in imec as of September 21, 2016 52 million euro. Further information on imec can be found at

Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nut”), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC Microelectronics (Shanghai) Co. Ltd.) and imec India (Imec India Private Limited), imec Florida (IMEC USA nanoelectronics design center).