Since JSR started developing photoresists on the KrF platform in the 1980s, emphasis has always been placed on quality and performance. It remains at the heart of our activities as we keep on developing new formulations to address the newest market needs in 248nm sensitive photoresists.
JSR prides itself on proposing a broad lineup of KrF grades with the following properties:
The following sections highlights some of JSR's portfolio through an overview of :
- line/space grades overview,
- contact/hole grades overview,
- focus on M91Y as a multipurpose photoresist,
- focus on M230Y for high resolution,
- focus on M170Y for critical contact/hole applications
Feel free to contact us for specific requests that may not be addressed on this page.
Below is an overview of the main L/S grades proposed by JSR.
Below is an overview of the main C/H grades proposed by JSR.
Focus on products
M91Y is a multipurpose photoresist designed for the 180nm node and above. It is suitable both for L/S and C/H applications.
M230Y targets CD-critical applications for 110nm technology nodes and even offers a wide process windows at 95nm CD.
M170Y was especially designed for CD-critical contacts/holes applications.
Disclaimer : The data presented on this page are an indication on JSR products and their performances, which may differ with process conditions.